E-beam evaporator inside glovebox cluster (GBox-EVA)

Evaporation

The 2DCC Inert Atmosphere Cluster Tool enables the fabrication and characterization of air-sensitive van der Waals heterostructures and devices. It consists of three major pieces of instrumentation housed in two conjoined, argon gas-filled gloveboxes. The tool features a state-of-the-art transfer stage from HQ Graphene, an atomic force microscope from Asylum Research (MFP-3D Origin+) and a customized two-glovebox system from M. Braun, Inc, with integrated physical vapor deposition capabilities from Island e-Beam.

Capabilities of E-Beam Evaporator (GBox-EVA)

In-situ physical vapor deposition of contacts for air-sensitive samples, and lithography-free device fabrication with stencil mask

  • Vacuum: as low as 5 * 10-7 mbar (4 * 10-7 Torr, 5 * 10-5 Pa)

  • Up to 4 crucibles

  • Source materials: metals (Au, Ti, Cr, Al) and oxides (Al2O3)

Capabilities of two-box cluster (GBoxClust)

Process air-sensitive van der Waals materials and thin films inside the glovebox

  • Custom stands and mechanical connections to minimize vibration

  • Filled with argon gas with oxygen < 0.1 PPM, water < 0.1 PPM

  • Sample transfer through a vacuum suitcase

  • Exfoliation area

  • Hot plate

E-beam evaporator inside glovebox cluster (GBox-EVA)