The 2DCC Inert Atmosphere Cluster Tool enables the fabrication and characterization of air-sensitive van der Waals heterostructures and devices. It consists of three major pieces of instrumentation housed in two conjoined, argon gas-filled gloveboxes. The tool features a state-of-the-art transfer stage from HQ Graphene, an atomic force microscope from Asylum Research (MFP-3D Origin+) and a customized two-glovebox system from M. Braun, Inc, with integrated physical vapor deposition capabilities from Island e-Beam.

Capabilities of 2D transfer stage (GBox-TRS)

Precise transfer stacking of air-sensitive van der Waals heterostructures

• Fully motorized, compute-controlled transfer

• 9 Degrees of Freedom: sample stage x/y/z/rotate, mask x/y/rotate/tilt, focus

• Precise translational motion control < 1µm

• Rotational motion with 0.01° precision

• 6 Objectives with darkfield mode: 2X, 10X, 20X, 40X, 50X, 100X (3mm working distance)

• PID-controlled heating and cooling of the sample stage, with a maximum stage temperature of 200°C

Capabilities of two-box cluster (GBoxClust)

Process air-sensitive van der Waals materials and thin films inside the glovebox

• Custom stands and mechanical connections to minimize vibration

• Filled with argon gas with oxygen < 0.1 PPM, water < 0.1 PPM

• Sample transfer through a vacuum suitcase

• Exfoliation area

• Hot plate