The 2DCC Inert Atmosphere Cluster Tool enables the fabrication and characterization of air-sensitive van der Waals heterostructures and devices. It consists of three major pieces of instrumentation housed in two conjoined, argon gas-filled gloveboxes. The tool features a state-of-the-art transfer stage from HQ Graphene, an atomic force microscope from Asylum Research (MFP-3D Origin+) and a customized two-glovebox system from M. Braun, Inc, with integrated physical vapor deposition capabilities from Island e-Beam.

Capabilities of AFM2 (GBox-AFM2)

Characterization of air-sensitive van der Waals materials and thin films

• Accommodate large samples, up to 80mm diameter and up to 10mm thick

• Modes: topography, KPFM, EFM, conductive AFM

• Noise level < 0.2 nm

Capabilities of two-box cluster (GBoxClust)

Process air-sensitive van der Waals materials and thin films inside the glovebox

• Custom stands and mechanical connections to minimize vibration

• Filled with argon gas with oxygen < 0.1 PPM, water < 0.1 PPM

• Sample transfer through a vacuum suitcase

• Exfoliation area

• Hot plate