M-2000 Ellipsometer

The M-2000® spectroscopic ellipsometer is engineered to meet the diverse demands of thin film characterization. An advanced optical design allows to determine the thickness and the optical parameters (index of refraction and absorption coefficient) of films from few nanometers up to few microns thick. The instrument covers 190 – 1700 nm spectral range. Mapping mode allows to visualize film thickness variations across the sample. Temperature controlled sample stage is available to observe thermal dynamics of films in the -50 to 350 °C range.
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