The FIB/SEM dual-beam system provides the unique capability to add or subtract material at precisely defined locations with high spatial resolution. Its integrated nano-manipulator allows preparation of TEM lamellas. 3D reconstructions is enabled through a "slice and view" before computationally recombining into a single 3D volume. Additional features include:

• An XHR SEM monochromated (UC) field emission electron gun (FEG), constant power lens optics and beam decelerator identical to the Verios for its SEM component.

• Its Tomahawk ion column features superior high current performance (65 nA max beam current) accelerating voltage from 500 - 30 kV, 2-stage differential pumping and time-of-flight correction for a tighter beam and more accurate scan profile.

• Available gas injections are: platinum deposition, carbon deposition, selective carbon mill, and insulator enhanced etch.

• Oxford energy dispersive X-ray spectrometer (EDS) for elemental mapping and analysis.

• EasyLift EX NanoManipulator for easy TEM lamella creation and lift-out.