Tool Configuration

• 305mm diameter electrode

• Mechanical Clamp with He backside cooling for better temperature control during etching

• Temperature compensated capacitance manometer

• Digital control Mass flow controllers for faster response

  • Gases: O₂, SF₆, Ar, CF₄

• Uniformity ring surrounding electrode to improve etch uniformity

• SQL server for recipe and data-logging storage

• Pendulum valve with closed loop pressure control for precise pressure control

Tool Cost of Ownership

• <1m² system footprint (extremely compact)

• Fully DeviceNet driven (digital communication with MFCs, gauges, pneumatics, turbo molecular pump, RF power supply, matching network)

• System can send e-mails to tech support to report on potential issues (ToolMail™)

• Extensive remote support capabilities

  • Monitor turbo pump key parameters (temperature, current, speed, etc.)

  • Monitor MFC calibration data

  • Monitor pressure gauge calibration data

  • Monitor bus voltages etc.

• ANSI ISA 88 compliant (traceability)