Temescal FC2000

Multiple Fixture Options Available

  • Precision lift-off deposition fixtures (TP-8 & HULA fixtures)

    • Sample mounting area for up to five 150mm dia. substrates

  • Batch conformal coating fixture (HSP Fixture)

    • Sample mounting area for up to:

      • Six 150mm dia. substrates and

      • Twelve 100mm substrates and

      • Twelve 50mm substrates

  • Fast thick film deposition

    • Up to 1 micron in 5 min (40A/sec)

  • Variable angle coating fixture

    • Sample mounting area for up to:

      • One 150mm dia. substrate

  • Auto flipping fixture for double-sided coating.

    • Sample mounting area for up to:

      • Two 200mm dia. substrate

MFC Controlled Gas Inlet

  • For O2 bleeding to improve quality of deposited oxides.

3 Quartz Heat Lamps

  • For chamber heating up to 300°C

    • 8 pocket e-gun source:

      • 10 kW power supply

      • Strong permanent magnet design reduces BSE and electron damage to photoresists

Single resistive (thermal) source

  • 2 kW power supply

Fully integrated, recipe-driven process and vacuum control user interface

  • Datalog /Historical log

    • captures over 200 variables

Universities