The Plasma-Therm 720 is a workhorse parallel plate reactive ion etch system for etching dielectrics, some metals, semi-metals and polymers using chlorine and fluorine based chemistries. It can etch small parts through 200mm (8 inch) wafers and masks up to 5" x 5". It is a recipe driven systems that includes special recipes to clean the systems to assure process reproducibility when switching chemistries.