Heidelberg DWL66+

This laser writer is a high resolution pattern generator for mask making and direct writing on any flat surface coated with photoresist. The most recent upgrade adds grey scale patterning. Both laser writers can print down to 800 nm with overlay accuracy of 500 nm.

The laser writer is a high resolution pattern generator (PG) for mask making and direct writing on any flat surface coated with photoresist. A digital pattern file, created by the user with Computer Aided Design (CAD) software, directs the laser to areas on the substrate to expose the photoresist.  This technique is often referred to as "maskless or direct-write" lithography.

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