Cameca SX Five Capabilities

• Simultaneous X-ray (WDS and EDS), SEM and BSE imaging

• High sensitivity (few tens of ppm) from sub-micron volumes

• Elemental detection from Be to U

• Optimized vacuum system for low-level analysis of carbon and boron

• Three High Sensitivity/high resolution WD spectrometers; Two 4-crystal High Resolution SpectrometersMultilayer/thin film analysis

• Monazite age dating

• LaB6 Electron Source for maximum versatility